Competence/Service Instrument Institution Institute Contact keywords (Anzahl ist nicht begrenzt) Relevant Topical Groups Bemerkung
Geodetic simulations of using clock measurements for gravity field determination, height system unification and monitoring mass variations PC LUH Institut für Erdmessung Jürgen Müller relativistic geodesy with clocks Quantum sensors for geodetical observations and relativistic geodesy NaN
Geodetic simulations of using clock measurements for gravity field determination, height system unification and monitoring mass variations PC LUH Institut für Erdmessung Hu Wu relativistic geodesy with clocks Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravimery using collimated Bose-Einstein Condensates QG-1 LUH Institut für Quantenoptik Nina Heine BEC, Atom interferometry, Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravimery using collimated Bose-Einstein Condensates QG-1 LUH Institut für Quantenoptik Marat Musakaev BEC, Atom interferometry, Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravimery using collimated Bose-Einstein Condensates QG-1 LUH Institut für Quantenoptik Waldemar Herr BEC, Atom interferometry, Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravimery using collimated Bose-Einstein Condensates QG-1 LUH Institut für Quantenoptik Ernst Rasel BEC, Atom interferometry, Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Absolute and relative gravimetry FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Ludger Timmen Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Timeseries analysis FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Ludger Timmen Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravity field modelling FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Ludger Timmen Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Temporal gravity changes FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Ludger Timmen Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Absolute and relative gravimetry FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Manuel Schilling Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Timeseries analysis FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Manuel Schilling Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Gravity field modelling FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Manuel Schilling Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Temporal gravity changes FG5X-220, gPhone-98, ZLS B-64, etc LUH Institut für Erdmessung Manuel Schilling Gravimetry Quantum sensors for geodetical observations and relativistic geodesy NaN
Additively manufactured vacuum chambers diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
19''-rack-compatible breadboarding diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
Fiberized sp-AOM-units for deep UV applications diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
Additively manufactured vacuum chambers diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
19''-rack-compatible breadboarding diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
Fiberized sp-AOM-units for deep UV applications diverse PTB (HITec) Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt transportable quantum sensors, optical clocks, mobile laser systems Quantum sensors for geodetical observations and relativistic geodesy NaN
Theoretical knowledge in tailoring light structure for manipulation of atomic processes Computer cluster, pencil and paper PTB Fundamental Physics for Metrology Yuriy Bidasyuk Vortex light, Bose Einstein Condensates Twisted Light NaN
Bose-Einstein condensate calculations Computer cluster, pencil and paper PTB Fundamental Physics for Metrology Yuriy Bidasyuk Vortex light, Bose Einstein Condensates Twisted Light NaN
Atomic structure calculations Computer cluster PTB Fundamental Physics for Metrology Anton Peshkov Light-matter interactions Twisted Light NaN
III/V MBE MBE PTB Cleanroom Klaus Pierz NaN Quantum Electrical Standards NaN
Graphene epitaxy SiC sublimation reactor PTB Cleanroom Klaus Pierz NaN Quantum Electrical Standards NaN
Semiconductor nanopatterning diverse PTB Cleanroom Hans Werner Schumacher NaN Quantum Electrical Standards NaN
Precision electrical measurements diverse PTB Working Group 2.53 Frank Hohls NaN Quantum Electrical Standards NaN
Cryogenic transport measurements diverse PTB Working Group 2.54 Frank Hohls NaN Quantum Electrical Standards NaN
Precision magnetic measurements diverse PTB Working Group 2.51 Franziska Weickert NaN Quantum Electrical Standards NaN
Development and fabrication of high power single-frequency fiber amplifiers at 1064nm and 1550nm NaN LZH NaN Peter Weßels high power fiber amplifiers, single-frequency, 1064nm, 1550nm, specialty fibers Laser Development and Stabilisation for next-generation GWDs NaN
Development and fabrication of high power fiber components like pump-combiner, cladding light stripper, mode-field adapter NaN LZH NaN Felix Wellmann high power fiber components, 1064nm, 1550nm Laser Development and Stabilisation for next-generation GWDs NaN
Laser amplifier static and dynamic simulation and modelling (rate equations, ASE, SBS, energy transfer, transfer functions) Home-made Python and Matlab codes LZH NaN Peter Weßels high power fiber amplifiers, single-frequency, 1064nm, 1550nm, rate equations, SBS, laser amplifier transfer functions Laser Development and Stabilisation for next-generation GWDs NaN
Fiber-Modal analysis Home-built S2-Imager LZH NaN Sven Hochheim fiber modes Laser Development and Stabilisation for next-generation GWDs NaN
NaN NaN NaN NaN NaN NaN NaN NaN
Laser stabilization NaN AEI NaN Benno Willke power stabilization, frequency stabilization, spatial filtering, laser stabilization Laser Development and Stabilisation for next-generation GWDs NaN
Coherent beam combination NaN AEI NaN Nina Bode coherent beam combination Laser Development and Stabilisation for next-generation GWDs NaN
Expertise on quantum-enhanced measurements NaN LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Efficient description of many-body quantum states NaN LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Magnetic field stabilization NaN LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Accurate atom counting NaN LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Dynamical optical potentials NaN LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Microwave phase noise analyzer Rhode und Schwarz Phasenrauschmessplatz FSWP LUH Institut für Quantenoptik Carsten Klempt NaN Spin Squeezing and Non-classical States NaN
Dry chemical etching diverse TUBS Institut für Halbleitertechnik Jana Hartmann etching tools for diverse Nitrides, silicon, oxides, metals Novel micro-optomechanical mirrors NaN
Dry chemical etching diverse TUBS Institut für Halbleitertechnik Andreas Waag etching tools for diverse Nitrides, silicon, oxides, metals Novel micro-optomechanical mirrors NaN
III-V semiconductor epitaxy diverse TUBS Institut für Halbleitertechnik Jana Hartmann NaN Novel micro-optomechanical mirrors NaN
III-V semiconductor epitaxy diverse TUBS Institut für Halbleitertechnik Andreas Waag NaN Novel micro-optomechanical mirrors NaN
Laser micro-processing Femtosecond laser micro-processing system LUH Institut für Quantenoptik Boris Chichkov NaN Novel micro-optomechanical mirrors NaN
Laser micro-processing Two-photon polymerization system LUH Institut für Quantenoptik Boris Chichkov NaN Novel micro-optomechanical mirrors NaN
Micro- and Nano-fabrication EBL PTB Cleanroom Stefanie Kroker 100 kV System Novel micro-optomechanical mirrors NaN
Micro- and Nano-fabrication Laser writing system TUBS Institut für Halbleitertechnik Jana Hartmann NaN Novel micro-optomechanical mirrors NaN
Micro- and Nano-fabrication Laser writing system TUBS Institut für Halbleitertechnik Andreas Waag NaN Novel micro-optomechanical mirrors NaN
Semi-analytical and numerical modeling of thermal noise in complex optical systems Home-made and commercial tools (COMSOL, Lumerical, JJCMWAve) TUBS Institut für Halbleitertechnik Stefanie Kroker NaN Novel micro-optomechanical mirrors NaN
Multiphysics Simulations COMSOL TUBS Institut für Halbleitertechnik Stefanie Kroker NaN Novel micro-optomechanical mirrors NaN
Machine Learning Python: tensorflow, keras TUBS Institut für Halbleitertechnik Liam Shelling Neto DeepLearning (GANs, DNNs, DeepQLearning, NEAT, KNN, VQGAN+CLIP, SVM) Novel micro-optomechanical mirrors NaN
Micro- and Nano-fabrication Electron beam lithography LUH Institut für Festkörperphysik Fei Ding 30 kV system Electron Microscopy NaN
Nanostructuring Focused Ion Beam TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn Cross-Beam SEM/FIB FEI Electron Microscopy NaN
Electron Microscopy/Spectroscopy Transmission Electron Microscope TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn Aberration correted TEM, STEM (JEOL) 80-200 kV, EDX, EELS, Tomography Electron Microscopy NaN
Electron Microscopy Tabletop Scanning Electron Microscope PTB (LENA) Working Group 5.13 Thomas Ahbe Easy to use Hitachi SEM Electron Microscopy NaN
Ion Milling Sample preparation Ion Milling PTB Working Group 5.13 Thomas Ahbe Cross-section and flat milling (Hitachi) Electron Microscopy NaN
Electron Microscopy Scanning Electron Microscope LUH Institut für Mikroproduktionstechnik Christoph Künzler SEM with EDX Electron Microscopy NaN
Electron Microscopy Scanning Electron Microscope PTB Working Group 5.24 Tobias Klein SEM with EDX (FEI) Electron Microscopy NaN
Electron Microscopy Transmission Electron Microscope LUH LNQE Fritz Schulze-Wischeler TEM, STEM (Tecnai), EDX and Tomography Electron Microscopy NaN
Sample preparation for TEM Dimple grinder and ion milling LUH LNQE Fritz Schulze-Wischeler Gatan Electron Microscopy NaN
Dual beam FIB/SEM resolution FIB ~4nm, resolution SEM ~0.7nm TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn NaN Electron Microscopy NaN
Transmission electron microscope resolution <80pm, EELS, EDS, tomography TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn NaN Electron Microscopy NaN
Dual beam FIB/SEM resolution FIB ~4nm, resolution SEM ~0.7nm TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Electron Microscopy NaN
Transmission electron microscope resolution <80pm, EELS, EDS, tomography TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Electron Microscopy NaN
Planarization Chemical Mechanical Polishing PTB Cleanroom Konstantin Thronberens planarization, CMP TrapFab NaN
Deposition of Gold Electroplating PTB Cleanroom Konstantin Thronberens deposition, electroplating TrapFab NaN
Flip Chip Technology Flip Chip Bonder PTB Cleanroom Konstantin Thronberens packaging, bonding TrapFab NaN
Fabrication of Multilayer Iontraps diverse PTB Cleanroom Amado Bautista deposition of gold, uv-lithography, packaging TrapFab NaN
Fabrication of Multilayer Iontraps diverse PTB Cleanroom Friederike Giebel deposition of gold, uv-lithography, packaging TrapFab NaN
Sputtering MRC - 8 Kathoden, 4'';\nSenvac - Z550;\nvon Ardenne - Clustersystem CS 730 S;\nKenotec - 8 Kathoden, 6'';\nScia - Mini40; LUH Institut für Mikroproduktionstechnik Alexander Kassner Sputtertargets: Al2O3, AlFeSil, Au, Bi5N, CoCrTa, CoFe90/10, Cr, CrMnPt, Cu, FeTa, MnBi, NiFe35/65, NiFe45/55, NiFe81/19, NiMn, PZT, SmCo, Sputterglas, Ta, Ti TrapFab NaN
Evaporation LeyboldLab500plus LUH Institut für Mikroproduktionstechnik Alexander Kassner Electron beam evaporation, Thermal evaporation, Pt, Cr, Cu, SiO2, Al2O3, others on request TrapFab NaN
PECVD Plasmalab 80 plus LUH Institut für Mikroproduktionstechnik Alexander Kassner SiO2, Si3N4 TrapFab NaN
Planarization Chemical Mechanical Polishing LUH Institut für Mikroproduktionstechnik Alexander Kassner NaN TrapFab NaN
Electroplating NaN LUH Institut für Mikroproduktionstechnik Alexander Kassner Cu, NiFe 81/19, Ni, CoFe, Sn TrapFab NaN
Ion Beam Etching IBE Commonwealth Scientific Corporation LUH Institut für Mikroproduktionstechnik Alexander Kassner NaN TrapFab NaN
Plasma Etching Plasmaanlage 4008 LUH Institut für Mikroproduktionstechnik Alexander Kassner N2, O2, CF4 TrapFab NaN
Deep Reactive Ion etching Plasmalab System 100 LUH Institut für Mikroproduktionstechnik Alexander Kassner etching of Si TrapFab NaN
Atomic Layer Deposition AVIZA Phanteon 304 LUH Institut für Mikroproduktionstechnik Alexander Kassner Al2O3 TrapFab NaN
Femtosecond-laser micromachining (subtractive) Spectra Physics Spitfire Pro LUH Institut für Quantenoptik Boris Chichkov fs-laser ablation TrapFab NaN
Laser surface treatment (coating separation, corrugation, grooving) Spectra Physics Spitfire Pro LUH Institut für Quantenoptik Boris Chichkov fs-laser ablation TrapFab NaN
Sub-µm resolution 3D printing of polymers (also large scale, high precision) Spectra Physics Tsunami LUH Institut für Quantenoptik Boris Chichkov Two-photon polymerization TrapFab NaN
Soft lithography replication/molding NaN LUH Institut für Quantenoptik Boris Chichkov Soft lithography TrapFab NaN
Squeezed light generation at 1064nm NaN AEI Institut für Gravitationsphysik Henning Vahlbruch Squeezed light, 1064nm, higher order mode squeezing, vacuum squeezing Non-classical light NaN
Squeezed light generation at 1550nm NaN AEI Institut für Gravitationsphysik Fabian Meylahn Squeezed light, 1550nm, non-classical laser stabilization Non-classical light NaN
High bandwidth, low noise homodyne detection NaN AEI Institut für Gravitationsphysik Dennis Wilken Squeezed light, GHz homodyne detetcion Non-classical light NaN
Effective negative mass oscillator two mode squeezer and waveplate AEI Institut für Gravitationsphysik Jonas Junker squeezing Non-classical light NaN
Effective negative mass oscillator two mode squeezer and waveplate AEI Institut für Gravitationsphysik Michèle Heurs squeezing Non-classical light NaN
Fusion splicing of optical fibers Fujikura fiber optic fusion splicer for single mode and polarization maintaining fibers PTB Department 4.3 Thomas Waterholter SM splicer, PM splicer Optical Clock Networks NaN
Fusion splicing of optical fibers Fujikura fiber optic fusion splicer for single mode and polarization maintaining fibers PTB Department 4.3 Sebastian Koke SM splicer, PM splicer Optical Clock Networks NaN
Frequency Dissemination with Fibres NaN PTB Department 4.3 Thomas Waterholter NaN Optical Clock Networks NaN
Frequency Dissemination with Fibres NaN PTB Department 4.3 Sebastian Koke NaN Optical Clock Networks NaN
Geodetic simulations of using clock measurements for gravity field determination, height system unification and monitoring mass variations PC LUH Institut für Erdmessung Hu Wu relativistic geodesy with clocks Optical clock networks NaN
Geodetic simulations of using clock measurements for gravity field determination, height system unification and monitoring mass variations PC LUH Institut für Erdmessung Jürgen Müller relativistic geodesy with clocks Optical clock networks NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt optical clocks Optical clock networks NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Steven King optical clocks Optical clock networks NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Nicolas Spethmann optical clocks Optical clock networks NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig optical clocks Optical clock networks NaN
Hydrogen-loaded optical fibres for the UV hydrogen loading setup PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Fabian Wolf UV fibers Optical clock networks NaN
Hydrogen-loaded optical fibres for the UV hydrogen loading setup PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Nimrod Hausser UV fibers Optical clock networks NaN
Resonant optical frequency doubling competence PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig frequency doubling Optical clock networks NaN
Resonant optical frequency doubling competence PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Christian Ospelkaus frequency doubling Optical clock networks NaN
Resonant optical frequency doubling competence PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt frequency doubling Optical clock networks NaN
Microscopy Keýence, confocal 3D Laser Scanning Microscope LUH Institut für Gravitationsphysik Harald Lück NaN Sub-standard quantum limit in suspended interferometers NaN
Microscopy Keýence, Digital microscope, Bright- and Dark-Field, polarised light, differential interference contrast LUH Institut für Gravitationsphysik Harald Lück NaN Sub-standard quantum limit in suspended interferometers NaN
Pulsed arc welder Orion 200i LUH Institut für Gravitationsphysik Harald Lück NaN Sub-standard quantum limit in suspended interferometers NaN
Optomechanical interaction SiNi mebranes within optical cavity AEI Institut für Gravitationsphysik Bernd Schulte dynamical backaction, radiation pressure, optical spring, optomechanics Backaction-Evading Techniques NaN
Quantum radiation pressure noise 4K Cryostat + optomechanical cavity AEI Institut für Gravitationsphysik Bernd Schulte cryostat, Kryostat Backaction-Evading Techniques NaN
Effective negative mass oscillator two mode squeezer and waveplate AEI Institut für Gravitationsphysik Jonas Junker squeezing Backaction-Evading Techniques NaN
Characterization of nano-mechanical resonators SiNi membranes/reosnators AEI Institut für Gravitationsphysik Bernd Schulte mechanical resonators, damping Backaction-Evading Techniques NaN
Optomechanical interaction SiNi mebranes within optical cavity AEI Institut für Gravitationsphysik Michèle Heurs dynamical backaction, radiation pressure, optical spring, optomechanics Backaction-Evading Techniques NaN
Quantum radiation pressure noise 4K Cryostat + optomechanical cavity AEI Institut für Gravitationsphysik Michèle Heurs cryostat, Kryostat Backaction-Evading Techniques NaN
Effective negative mass oscillator two mode squeezer and waveplate AEI Institut für Gravitationsphysik Michèle Heurs squeezing Backaction-Evading Techniques NaN
Characterization of nano-mechanical resonators SiNi membranes/reosnators AEI Institut für Gravitationsphysik Michèle Heurs mechanical resonators, damping Backaction-Evading Techniques NaN
Calculations for Lorentz violations in gravity and electromagnetism Mathematica, pencil and paper ZARM Gravity Group Christian Pfeifer NaN Tests of Fundamental Physics - Gravity NaN
Differential geometry Mathematica, pencil and paper ZARM Gravity Group Christian Pfeifer NaN Tests of Fundamental Physics - Gravity NaN
Symbolic tensor algebra calculus on the computer Mathematica, xAct ZARM Gravity Group Christian Pfeifer NaN Tests of Fundamental Physics - Gravity NaN
Analysis of Lunar Laser Ranging data Workstation, pencil and paper LUH Institut für Erdmessung Liliane Biskupek NaN Tests of Fundamental Physics - Gravity NaN
Determination of relativistic parameters Workstation, pencil and paper LUH Institut für Erdmessung Liliane Biskupek NaN Tests of Fundamental Physics - Gravity NaN
Investigation the influence of relativistic quantities in the Earth-Moon system Workstation, pencil and paper LUH Institut für Erdmessung Liliane Biskupek NaN Tests of Fundamental Physics - Gravity NaN
Analysis of Lunar Laser Ranging data Workstation, pencil and paper LUH Institut für Erdmessung Jürgen Müller NaN Tests of Fundamental Physics - Gravity NaN
Determination of relativistic parameters Workstation, pencil and paper LUH Institut für Erdmessung Jürgen Müller NaN Tests of Fundamental Physics - Gravity NaN
Investigation the influence of relativistic quantities in the Earth-Moon system Workstation, pencil and paper LUH Institut für Erdmessung Jürgen Müller NaN Tests of Fundamental Physics - Gravity NaN
Indentation modulus and hardness on micro- and nanopillars by nanoindendation, Hysitron TriboIndenter TI-950 PTB Department 5.1 Uwe Brand NaN Tests of Fundamental Physics - Gravity NaN
Stiffness calibration of nanostructures Microforce measurement facility PTB Department 5.1 Uwe Brand NaN Tests of Fundamental Physics - Gravity NaN
Kelvin probe microscopy Cypher S AFM microscope PTB Department 5.1 Uwe Brand NaN Tests of Fundamental Physics - Gravity NaN
Roughness measurement on nanostructures MEMS-Picoindenter PTB Department 5.1 Uwe Brand NaN Tests of Fundamental Physics - Gravity NaN
Laser micro-processing Femtosecond laser micro-processing system LUH Institut für Quantenoptik Boris Chichkov NaN Structured Illumination at the Nanoscale NaN
Laser micro-processing Two-photon polymerization system LUH Institut für Quantenoptik Boris Chichkov NaN Structured Illumination at the Nanoscale NaN
Epitaxy/Deposition Metal organic vapor phase epitaxy TUBS Institut für Halbleitertechnik Jana Hartmann for III-Nitrides, up to 4" wafers Structured Illumination at the Nanoscale NaN
Epitaxy/Deposition Atomic Layer Deposition TUBS Institut für Halbleitertechnik Jana Hartmann Picosun R200 (for SiO2, Al2O3, ZnO) Structured Illumination at the Nanoscale NaN
Epitaxy/Deposition Plasma Enhanced Chemical Vapor Deposition TUBS Institut für Halbleitertechnik Jana Hartmann Oxford PlasmaPro 80, for SiO2, Si3N4, a-Si:H, up to 8" wafers, with frequency mixing for low stress layers Structured Illumination at the Nanoscale available from winter 2021/2022 on
Epitaxy/Deposition Evaporation TUBS Institut für Halbleitertechnik Jana Hartmann for SiO2, metalls Structured Illumination at the Nanoscale NaN
Epitaxy/Deposition UHV Pulsed Sputter Deposition TUBS Institut für Halbleitertechnik Jana Hartmann for III-Nitrides, up to 4" wafers Structured Illumination at the Nanoscale NaN
Lithography Photolithography TUBS Institut für Halbleitertechnik Jana Hartmann Mask Aligner MJB4 (from Süß MicroTec), for up to 4" wafers Structured Illumination at the Nanoscale NaN
Lithography Laser Lithography TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann Heidelberg Instruments DWL66fs, up to 8" wafers, minimum feature size 0.6 µm Structured Illumination at the Nanoscale NaN
Lithography Laser Lithography PTB (LENA) Institut für Halbleitertechnik Jana Hartmann Heidelberg Instruments DWL66fs, up to 8" wafers, minimum feature size 0.6 µm Structured Illumination at the Nanoscale NaN
Lithography Nanoimprint Lithography TUBS Institut für Halbleitertechnik Jana Hartmann self-made nanoimprint for soft imprint, for up to 4" wafers Structured Illumination at the Nanoscale NaN
Etching Reactive Ion Etching by Inductively Coupled Plasma TUBS Institut für Halbleitertechnik Jana Hartmann Sentech SI 500, with F-based chemistry, LN2 cooled, up to 8" wafers Structured Illumination at the Nanoscale NaN
Etching Reactive Ion Etching by Inductively Coupled Plasma TUBS Institut für Halbleitertechnik Jana Hartmann Oxford PlasmaPro 100, with Cl-based chemistry, up to 8" wafers Structured Illumination at the Nanoscale NaN
Chip processing Wafer saw TUBS Institut für Halbleitertechnik Jana Hartmann Kulicke & Soffa Model 982-6, for Si and Sap wafers Structured Illumination at the Nanoscale NaN
Chip processing/Laser processing Laser Lift-Off TUBS Institut für Halbleitertechnik Jana Hartmann for separation of GaN from sapphire substrates Structured Illumination at the Nanoscale NaN
Chip processing Wafer Bonder TUBS Institut für Halbleitertechnik Jana Hartmann Süss SB6; for eutectic, anodic, adhesive wafer bonding, up to 4" wafers Structured Illumination at the Nanoscale NaN
Chip processing Wire Bonder TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann HB10 from TPT Wire Bonder GmbH; semi-automatic thermosonic wedge & ball bonder Structured Illumination at the Nanoscale NaN
Electron microscopy Scanning Electron Microscopes TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann Tescan Mira3 GMH FE-SEM Mira CL with LN2 cooling station and Kleindiek MM3A-EM manipulators; Zeiss SEM with EDX und EBSD detectors; Dual Beam SEM (Thermofisher Helios 5 UX dual beam) with Focussed Ion Beam (FIB) and Scanning Transmission Mode (STEM) Structured Illumination at the Nanoscale NaN
Cathodoluminescence Time-integrated and Time-resolved Cathodoluminescence TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann NaN Structured Illumination at the Nanoscale NaN
Photoluminescence Time-integrated and Time-resolved Photoluminescence TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann NaN Structured Illumination at the Nanoscale NaN
Atomic force microscopy Atomic Force Microscopy combined with Raman Spectroscopy TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann NaN Structured Illumination at the Nanoscale NaN
Super-resolution microscopy Stimulated Emission Depletion Microscopy TUBS (LENA) Institut für Halbleitertechnik Jana Hartmann NaN Structured Illumination at the Nanoscale NaN
Annealing Rapid Thermal Annealing TUBS Institut für Halbleitertechnik Jana Hartmann for III-Nitrides, metal contacts Structured Illumination at the Nanoscale NaN
Annealing High temperature oven TUBS Institut für Halbleitertechnik Jana Hartmann for annealing of AlN, for up to 4" wafer, temperatures up to 1700°C Structured Illumination at the Nanoscale NaN
Micro- and Nano-fabrication Laser writing system TUBS Institut für Halbleitertechnik Jana Hartmann NaN Structured Illumination at the Nanoscale NaN
Micro- and Nano-fabrication Laser writing system TUBS Institut für Halbleitertechnik Andreas Waag NaN Structured Illumination at the Nanoscale NaN
Small forces measurement Torsion Balance LUH/AEI Institut für Gravitationsphysik Moritz Mehmet NaN Space Laser Gravimetry NaN
Modelling of satellites, orbit integration XHPS simulator ZARM Space Science Meike List High Performance Satellite Dynamics Simulator (HPS) Space Laser Gravimetry NaN
Modelling of satellites, orbit integration XHPS simulator ZARM Space Science Benny Rievers High Performance Satellite Dynamics Simulator (HPS) Space Laser Gravimetry NaN
Modelling of Earth's gravitational field Software LUH Institut für Erdmessung Jürgen Müller NaN Space Laser Gravimetry NaN
Absolute or Relative Gravimetry Various gravimeter LUH Institut für Erdmessung Jürgen Müller NaN Space Laser Gravimetry NaN
Laser Ranging Interferometry GRACE-FO Laser Ranging Interferometer LUH/AEI Institut für Gravitationsphysik Vitali Müller NaN Space Laser Gravimetry NaN
RF Photoreceivers diverse LUH/AEI Institut für Gravitationsphysik Germán Fernández Barranco mainly InGaAs photodiodes with low-noise electronics, typically with bandwidth up to ~20 MHz Space Laser Gravimetry NaN
Measurement of Temperature Variations temperature readout devices LUH/AEI Institut für Gravitationsphysik Vitali Müller low-noise readout of NTC or PTC thermistors, 3 Hz, 10 µK/rtHz Space Laser Gravimetry NaN
Beatnote phasetracking Various phasemeter LUH/AEI Institut für Gravitationsphysik Esteban Delgado bandwidth typically up to ~20 MHz using DPLL Space Laser Gravimetry NaN
Analytical and numerical modeling of optical propeties of single nanioparticles and nanoparticle structures, Multipole decomposition methods Home-made and commercial simulation tools LUH Institut für Quantenoptik Boris Chichkov NaN Optical Simulations NaN
Semi-analytical and numerical modeling of thermal noise in complex optical systems Home-made and commercial tools (COMSOL, Lumerical, JJCMWAve) TUBS Institut für Halbleitertechnik Stefanie Kroker NaN Optical Simulations NaN
Mulstiphysucs Simulations COMSOL TUBS Institut für Halbleitertechnik Stefanie Kroker NaN Optical Simulations NaN
Laser beam analysis (higher order mode content) wincam or similar plus mode-fitting software AEI Institut für Gravitationsphysik Gerhard Heinzel NaN Optical Simulations NaN
Thermal vacuum testing Thermal vacuum test chamber AEI Institut für Gravitationsphysik Brigitte Kaune NaN Optical Simulations NaN
Hydroxycatalysis bonding cleanroom, coordinate measurement machine AEI Institut für Gravitationsphysik Stefan Ast NaN Optical Simulations NaN
Silicate bonding cleanroom, coordinate measurement machine AEI Institut für Gravitationsphysik Stefan Ast NaN Optical Simulations NaN
ASAP, ZEMAX Software licenses AEI Institut für Gravitationsphysik Gudrun Wanner NaN Optical Simulations NaN
IfoCAD Library NaN AEI Institut für Gravitationsphysik Gudrun Wanner 3D ray tracing, Gaussian beam propagation, diffraction simulation, interferometer design, imaging optics design Optical Simulations NaN
IfoCAD Library, Git, DevOps NaN AEI Institut für Gravitationsphysik Tim Haase 3D ray tracing, Gaussian beam propagation, diffraction simulation, interferometer design, imaging optics design Optical Simulations NaN
Laser amplifier static and dynamic simulation and modelling (rate equations, ASE, SBS, energy transfer, transfer functions) Home-made Python and Matlab codes\n LZH NaN Peter Weßels high power fiber amplifiers, single-frequency, 1064nm, 1550nm, rate equations, SBS, laser amplifier transfer functions\n Optical Simulations NaN
Numerical laser beam propagation\n Home-made beam propagation code LZH NaN Peter Weßels BPM, beam propagation method, eigenmode solver Optical Simulations NaN
Multiphysics simulations combining laser beam propagation, rate equations, thermal effects Home-made Matlab code LZH NaN Peter Weßels BPM, beam propagation methos, thermal effects, waveguide modification Optical Simulations NaN
Machine Learning Python: tensorflow, keras TUBS Institut für Halbleitertechnik Liam Shelling Neto DeepLearning (GANs, DNNs, DeepQLearning, NEAT, KNN, VQGAN+CLIP, SVM) Optical Simulations NaN
Characterization of nano-mechanical resonators SiNi membranes/reosnators AEI Institut für Gravitationsphysik Bernd Schulte mechanical resonators, damping Optical Simulations NaN
Characterization of nano-mechanical resonators SiNi membranes/reosnators AEI Institut für Gravitationsphysik Michèle Heurs mechanical resonators, damping Optical Simulations NaN
Analytical and numerical methods of matterwave propagation home-made fortran, matlab and python codes LUH Institut für Quantenoptik Naceur Gaaloul BEC, atom interferometry, many-body physics Optical Simulations NaN
Analytical and numerical methods of matterwave propagation home-made fortran, matlab and python codes LUH Institut für Quantenoptik Stefan Seckmeyer BEC, atom interferometry, many-body physics Optical Simulations NaN
Numerical methods of light diffraction IfoCAD and python codes LUH Institut für Quantenoptik Stefan Seckmeyer beam diffraction, AI beam clipping, wave-front distortions Optical Simulations NaN
Monte-Carlo Simulations Computing cluster LUH Institut für Theoretische Physik Hendrik Weimer NaN Open many-body Quantum Systems NaN
Tensor Network Methods Computing cluster LUH Institut für Theoretische Physik Hendrik Weimer NaN Open many-body Quantum Systems NaN
Magnetic field stabilization NaN PTB Institute for Experimental Quantum Metrology (QUEST) Henning Fürst NaN Tests of fundamental physics - spectroscopy NaN
Magnetic field stabilization NaN PTB Institute for Experimental Quantum Metrology (QUEST) Tanja Mehlstäubler NaN Tests of fundamental physics - spectroscopy NaN
Precision spectroscopy at octupole transition in 172Yb+ ions NaN PTB Institute for Experimental Quantum Metrology (QUEST) Chih-Han Yeh NaN Tests of fundamental physics - spectroscopy NaN
Precision spectroscopy at octupole transition in 172Yb+ ions NaN PTB Institute for Experimental Quantum Metrology (QUEST) Tanja Mehlstäubler NaN Tests of fundamental physics - spectroscopy NaN
Isotope shift calculations Workstation, pencil and paper PTB Fundamental Physics for Metrology Andrey Surzhykov Relativistic many-body calculations, effects of New Physics Tests of fundamental physics - spectroscopy NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Piet Schmidt optical clocks Tests of fundamental physics - spectroscopy NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Steven King optical clocks Tests of fundamental physics - spectroscopy NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Nicolas Spethmann optical clocks Tests of fundamental physics - spectroscopy NaN
Reference transitions in Ca+, Al+ and Ar13+ for frequency comparisons four optical clock setups PTB/LUH Institute for Experimental Quantum Metrology (QUEST) Stephan Hannig optical clocks Tests of fundamental physics - spectroscopy NaN
Micro- and Nano-fabrication Electron beam lithography LUH Institut für Festkörperphysik Fei Ding 30 kV system (with automatic proximity correction) Single Photons NaN
Fabrication of semiconductor nanomembranes Photolithography LUH Institut für Festkörperphysik Fei Ding NaN Single Photons NaN
Fabrication of semiconductor nanomembranes Wet Chemical Etching LUH Institut für Festkörperphysik Fei Ding NaN Single Photons NaN
Micro- and Nano-fabrication Scanning electron microscopy LUH Institut für Festkörperphysik Fei Ding NaN Single Photons NaN
Micro- and Nano-fabrication Energy-dispersive X-ray spectroscopy LUH Institut für Festkörperphysik Fei Ding NaN Single Photons NaN
Micro- and Nano-fabrication ICP-reactive ion etching LUH Institut für Festkörperphysik Fei Ding Mainly for III-V semiconductors Single Photons NaN
Micro- and Nano-fabrication Strain tuning of nanomaterials with piezoelectric actuators LUH Institut für Festkörperphysik Fei Ding Thin membranes, 2D materials Single Photons NaN
Growth of III-V semiconductor nanostructures Al droplet etching and nanohoe infilling LUH Institut für Festkörperphysik Fei Ding GaAs/AlGaAs quantum dots Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Tuning knobs: Laser Power, Emission Polarization, Sample Position, Sample Temperature, Sample Voltage, Laser wavelength LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy spectrometers for detection in range of 700 - 1600nm LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy 2 closed-cycle He cryostats LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Unidirectional magnetic field up to 9T in one cryostat LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy White-light imaging LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy 4 switchable excitation lasers (diode lasers, continously tunable Ti:Sa cw and pulsed 140fs laser) LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Superconducting nanowire detectors for single-photon detection from 700 to 900nm and 1300-1550nm LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Single-photon detectors (APDs) for 400-900nm LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Unit for Time-correlated single photon counting LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-1600nm (entanglement tomography measurement) Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy High-resolution double-spectrometer LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Coherence time (T2) measurement (Michelson interferometer) LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy TCSPC with APDs LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Resonant two-photon excitation LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Hanbury-Brown-Twiss setup (autocorrelation measurements) LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Setup for measuring indistinguishability of single photons LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Polarization-dependent single-photon cross-correlation measurements LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Fluorescence lifetime measurements LUH Institut für Festkörperphysik Fei Ding T=4-300K, 700-900nm and 1300-1550nm Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Tuning knobs: Laser Wavelength, laser power, polarization, temperature (10 K - 300 K) PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Confocal microscope setups (2 RT, 2 LT (10K) PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Several excitation wavelengths (532 nm, 670 nm, pulsed and cw) PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Spectrometers for detection in range of 700 - 1600nm PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy 2 He cryostats PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Single-photon detectors (Si SPADs) for 400-900nm PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Single-photon detectors (InGaAs SPADs) for 900-1600nm PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Units for Time-correlated single photon counting PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy White-light imaging PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy TCSPC with APDs PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Hanbury-Brown-Twiss setup (autocorrelation measurements) PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Fluorescence lifetime measurements PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy Calibration setups for single-photon detectors (Si and InGaAs) PTB Abteilung 4 Stefan Kück NaN Single Photons NaN
Laser micro-processing Femtosecond laser micro-processing system LUH Institut für Quantenoptik Boris Chichkov NaN Single Photons NaN
Laser micro-processing Two-photon polymerization system LUH Institut für Quantenoptik Boris Chichkov NaN Single Photons NaN
Micro-photoluminescence and single-photon spectroscopy standard techniques (currently room-temperature only) PTB/LUH FKP / Abteilung 4 Andreas Schell TCSPS, visible spectrsocopy, lifetime emasurements, confocal micrsocopy Single Photons NaN
High resolution scanning tunneling microscope Ultra-high-vacuum, variable temperature 300-10K TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
High resolution scanning tunneling microscope Ultra-high-vacuum, 4K, photon detection TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
Scanning tunneling microscope ambient conditions TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
Atomic force microscopy ambient condiotins, liquid TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
Molecular beam epitaxy for molecules that can be evaporated in ultra-high vacuum TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
Ultra-high vacuum sample preparation NaN TUBS (LENA) NaN Uta Schlickum NaN Single Photons NaN
Metal-organic vapour phase epitaxy of III-nitrides AIXTRON AIX200RF TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Molecular beam epitaxy of III-nitrides RIBER 32 TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Rapid thermal annealing 200 K/s, <1200K TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Atomic force microscopy ambient conditions TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
High resolution X-ray diffraction Xpert TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Photoluminescence spectroscopy NIR - UV, lasers 405nm, 375nm, 335nm, 10 - 300K, power dependent, micro-PL, automated T and p scans TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Photoluminescence spectroscopy VIS-UV, 4-400K, lasers 325nm+266nm, 1m high res. spectrometer, CCD TUBS Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Ultrafast optical spectroscopy 35fs laser, 2nd, 3rd, 4th harmonic, 80MHz+5kHz + pulse picker, tunable OPA, streak camera 900fs, 5 - 400K TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Single photon optics Lab visible; room-temperature LUH Institut für Festkörperphysik Andreas Schell NaN Single Photons NaN
Dual beam FIB/SEM resolution FIB ~4nm, resolution SEM ~0.7nm TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn NaN Single Photons NaN
Transmission electron microscope resolution <80pm, EELS, EDS, tomography TUBS (LENA) Institut für Angewandte Physik Markus Etzkorn NaN Single Photons NaN
Dual beam FIB/SEM resolution FIB ~4nm, resolution SEM ~0.7nm TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
Transmission electron microscope resolution <80pm, EELS, EDS, tomography TUBS (LENA) Institut für Angewandte Physik Andreas Hangleiter NaN Single Photons NaN
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